12 December 1997 Modeling an optical micromachine probe
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Abstract
Silicon micromachines are fabricated using Surface Micro-Machining (SMM) techniques. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50-μm in diameter and can be driven at rotation rates exceeding 300,000-rpm. Measuring and analyzing microengine performance is basic to micromachine development and system applications. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. We describe the modeling of an optical probe developed at Sandia National Laboratories. Experimental data will be compared with output from the model. Key words: Micromachines, optical probe, performance analysis, optical modeling
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anthony Mittas, Fred M. Dickey, Scott C. Holswade, "Modeling an optical micromachine probe", Proc. SPIE 3173, Ultrahigh- and High-Speed Photography and Image-based Motion Measurement, (12 December 1997); doi: 10.1117/12.294528; https://doi.org/10.1117/12.294528
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