Radial shearing interferometer for in-process measurement of diamond turning

Tsuguo Kohno; Daishi Matsumoto; Takanori Yazawa; Yutaka Uda

doi:10.1117/12.294519

12 December 1997 Radial shearing interferometer for in-process measurement of diamond turning

Tsuguo Kohno, Daishi Matsumoto, Takanori Yazawa, Yutaka Uda

Proceedings Volume 3173, Ultrahigh- and High-Speed Photography and Image-based Motion Measurement; (1997) https://doi.org/10.1117/12.294519
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A stable interferometer using two zone plates to measure concave mirror figure is developed. The principle of the measurement is based on the radial shearing interference in which the measuring wavefront from the entire mirror surface under test is referred to that of the central part. On-machine experiments showed that the interferometer would be applicable to the in-process measurement for a diamond turning in about 0.06 micrometers p-p accuracy.

Citation Download Citation

Tsuguo Kohno, Daishi Matsumoto, Takanori Yazawa, and Yutaka Uda "Radial shearing interferometer for in-process measurement of diamond turning", Proc. SPIE 3173, Ultrahigh- and High-Speed Photography and Image-based Motion Measurement, (12 December 1997); https://doi.org/10.1117/12.294519

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