A research on using linear array CCD detecting technique in measuring form and position errors of large scale dimension is described in this paper. The basic idea of this kind of measurement is that using a stable aligned laser beam incident on a 1D asymmetrical phase plate to form a black line as the reference of the beam, form and position datum lines and planes can be established through a scanner. A linear array CCD is used to measure deviation between the datum and the quantity be measured directly and absolutely. In the paper, we also discuss the reading error of the CCD probe caused by various factors in detail and introduce the CCD probe and its signal processing circuit. Some of experiment results and its application are shown.