Characteristic of surface layer of periodic segment proton-exchanged and annealed LiTaO3

Yushan Li; Shaojie Ma; Kunio Tada

doi:10.1117/12.300653

20 February 1998 Characteristic of surface layer of periodic segment proton-exchanged and annealed LiTaO3

Yushan Li, Shaojie Ma, Kunio Tada

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300653
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

Proton-exchanged and annealed film in z-cut LiTaO₃ with and without the periodic segment are fabricated. The refractive index, lattice constant, proton concentration, and infrared absorption spectrum of samples are measured by prism coupling, x-ray rocking, SIMS, and spectrometer, respectively. The refractive index increase and the change in lattice constant of the surface layer are noticed during the annealed process.

Citation Download Citation

Yushan Li, Shaojie Ma, and Kunio Tada "Characteristic of surface layer of periodic segment proton-exchanged and annealed LiTaO3", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300653

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