20 February 1998 Influence of H2O on structure of base-catalyzed porous SiO2 antireflective coatings
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Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300638
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China
Abstract
Silica antireflective coatings were deposited on KB-7 glass substrates by sol-gel method. The sols were produced via ammonia catalysis tetraethylorthosilicate (TEOS) diluted in ethanol, using different molar ratio, R, of H2O/TEOS. The influence of amount of water on structure of coatings was investigated by measuring thickness, refractive index, and infrared spectrum of the coatings and BET surface area of the dried gel silica power. The results revealed that the thickness and the refractive index were decreased with the increase of R, whereas the surface area was increased with the increase of R. The infrared spectra indicated that the densification of coating reduced with increase of R.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiaolin Liu, Xiaolin Liu, Weiqing Zhang, Weiqing Zhang, Yueqin Le, Yueqin Le, Yongxing Tang, Yongxing Tang, Jinren Sun, Jinren Sun, Peihui Liang, Peihui Liang, } "Influence of H2O on structure of base-catalyzed porous SiO2 antireflective coatings", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300638; https://doi.org/10.1117/12.300638
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