20 February 1998 Polymerized-film replication of micro-optics elements
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Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998); doi: 10.1117/12.300709
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China
Abstract
A new method for replicating microstructure elements is presented. The principle and technological process of the method are introduced. For one polymer, deep binary relief grating on quartz substrate is replicated by using this new method and the relief-transfer efficiency and transparency are measured. The results show that the replicas are of high fidelity of profile and are suitable for practical applications.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lin Pang, Bo Chen, Lurong Guo, Hongjun Zeng, Weijian Tian, "Polymerized-film replication of micro-optics elements", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); doi: 10.1117/12.300709; https://doi.org/10.1117/12.300709
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KEYWORDS
Polymers

Micro optics

Binary data

Quartz

Transparency

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