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20 February 1998 Sol-gel preparation of PZT thin films with BaTiO3 seeds
Aiying Wu, P. M. Vilarinho, I. M. Miranda Salvado, J. L. Baptista
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Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300674
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China
Abstract
The lead zirconate titanate (PZT) thin films, with Zr/Ti ratio of 52/48 have been synthesized by the sol-gel method. Perovskite barium titanate (BaTiO3) nanopowders have been introduced in the precursor sols as seeds, to induce the perovskite phase formation at low temperatures. Their effect on the phase formation process, during the crystallization of PZT thin film was studied. Pure perovskite PZT thin films were obtained at 550 degrees Celsius and 600 degrees Celsius, when 5 mole% and 1 mole% perovskite BT crystalline seeds were used, respectively.
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Aiying Wu, P. M. Vilarinho, I. M. Miranda Salvado, and J. L. Baptista "Sol-gel preparation of PZT thin films with BaTiO3 seeds", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300674
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KEYWORDS
Ferroelectric materials
Thin films
Perovskite
Sol-gels
Crystals
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