13 June 1997 Lithium niobate as the substratum for the SAW acceleration sensor
Author Affiliations +
Proceedings Volume 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology; (1997); doi: 10.1117/12.276234
Event: XII Conference on Solid State Crystals: Materials Science and Applications, 1996, Zakopane, Poland
Abstract
Some aspects of the design of SAW acceleration sensors are investigated. The principles of operation are briefly reassumed. Our studies reveal that the cantilever beam is the optimum mechanical structure for the device. The calculations and experiments allow to determine the limits of applicability of lithium niobate as the substratum for the SAW acceleration sensor.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jerzy Filipiak, Lech Solarz, Jerzy Ostrowski, Cezary Kopycki, "Lithium niobate as the substratum for the SAW acceleration sensor", Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); doi: 10.1117/12.276234; https://doi.org/10.1117/12.276234
PROCEEDINGS
4 PAGES


SHARE
KEYWORDS
Sensors

Transducers

Measurement devices

Lithium niobate

Wave propagation

Lithium

Acoustics

Back to Top