Structural characteristics and applications of zirconium dioxide formed by super-high-speed thermal treatment

L. M. Lynkov; V. V. Soloviev; S. V. Zhdanovich; N. P. Petrov; V. A. Bogush

doi:10.1117/12.276222

13 June 1997 Structural characteristics and applications of zirconium dioxide formed by super-high-speed thermal treatment

L. M. Lynkov, V. V. Soloviev, S. V. Zhdanovich, N. P. Petrov, V. A. Bogush

Author Affiliations +

Proceedings Volume 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology; (1997) https://doi.org/10.1117/12.276222
Event: XII Conference on Solid State Crystals: Materials Science and Applications, 1996, Zakopane, Poland

Abstract

The results of x-ray diffraction and Auger spectroscopy of zirconium dioxide thin films are presented. These methods were used for studying the structural properties of zirconium dioxide thin films depending on the time and temperature range of thermal treatment. Super high-speed thermal treatment of metalorganic compositions of zirconium alcoholic solutions, Zr thin films and Zr anodic oxides thin films has been applied to prepare the samples which were annealed during 1-10s in situ at T equals 500 degrees C and higher at the rate of 80-250 degrees C/s with the following gradual cooling to the room temperature. The formed thin films have the following texture degree: anodic gradual cooling to the room temperature. The formed thin films have the following texture degree: anodic ZrO₂(Y₂O₃) - 98 percent. ZrO₂ formed by oxidation of Zr thin films - 71 percent, ZrO₂ formed from Zr metalorganic compositions - 100 percent. Auger analysis showed that anodic ZrO₂ thin films had the best barrier properties.

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L. M. Lynkov, V. V. Soloviev, S. V. Zhdanovich, N. P. Petrov, and V. A. Bogush "Structural characteristics and applications of zirconium dioxide formed by super-high-speed thermal treatment", Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); https://doi.org/10.1117/12.276222

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