X-ray holography for VLSI using synthetic bilevel holograms

Ronald E. Burge; Joachim N. Knauer; XiaoCong Yuan; Keith Powell

doi:10.1117/12.280549

14 August 1997 X-ray holography for VLSI using synthetic bilevel holograms

Ronald E. Burge, Joachim N. Knauer, XiaoCong Yuan, Keith Powell

Proceedings Volume 3183, Microlithographic Techniques in IC Fabrication; (1997) https://doi.org/10.1117/12.280549
Event: ISMA '97 International Symposium on Microelectronics and Assembly, 1997, Singapore, Singapore

Abstract

The gains are pointed out of the potential replacement of the usual patterned transmission x-ray mask, in consideration of high-resolution proximity lithography for VLSI, by a diffraction element, or bilevel in-line hologram, to be projected under near-field conditions using synchrotron radiation. The hologram can be configured to correct for diffraction blurring due to projection, and be designed for pre-determined gaps between mask and wafer. The adjustment of experimental parameters can account for the waveguide effects that arise from mask elements with small features which are several hundred x-ray wavelengths thick.It is shown that the hologram, for projection printing at the 50nm feature size, at mask to wafer gaps of 10micrometers or greater, can be fabricated in a similar fashion to a high-resolution mask. The calculation of the hologram is computationally intensive, but a database of calculated features is envisaged.

Citation Download Citation

Ronald E. Burge, Joachim N. Knauer, XiaoCong Yuan, and Keith Powell "X-ray holography for VLSI using synthetic bilevel holograms", Proc. SPIE 3183, Microlithographic Techniques in IC Fabrication, (14 August 1997); https://doi.org/10.1117/12.280549

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available