11 August 1997 Integrated uncooled array IR sensors
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Proceedings Volume 3200, Third Conference on Photonic Systems for Ecological Monitoring; (1997) https://doi.org/10.1117/12.284744
Event: Third Conference on Photonic Systems for Ecological Monitoring, 1996, Prague, Czech Republic
Abstract
Technologies enabling low-dissipation designs for uncooled array IR sensors are offered. The technique involves the etching of special buffer layers from under a 1-micrometers membrane followed by deposition of an IR-sensitive film and electrode structure. The electrical and physical properties of plumbum-zirconate-titanate, barium titanate, tetraaminodiphenyl, polyvinylidene fluoride pyroelectric films are compared. A circuit for sensing pyroelectric signals in a CCD is considered.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugeny Ph. Pevtsov, Eugeny Ph. Pevtsov, Eugeny G. Elkin, Eugeny G. Elkin, Marina A. Pospelova, Marina A. Pospelova, } "Integrated uncooled array IR sensors", Proc. SPIE 3200, Third Conference on Photonic Systems for Ecological Monitoring, (11 August 1997); doi: 10.1117/12.284744; https://doi.org/10.1117/12.284744
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