2 January 1998 Optical gating techniques for material inspection
Author Affiliations +
Proceedings Volume 3201, Sensors and Controls for Advanced Manufacturing; (1998) https://doi.org/10.1117/12.298019
Event: Intelligent Systems and Advanced Manufacturing, 1997, Pittsburgh, PA, United States
Abstract
Optical gating techniques provide an important method for the non-destructive evaluation of a number of different transparent, translucent, and even highly scattering materials. We have used optical coherence tomography with 1.3 micrometers wavelength light to probe the subsurface region of ceramic, diamond film, single crystal silicon carbide, and other samples. We have demonstrated sample penetration depths of 100 to 1300 micrometers . We have achieved lateral spatial resolutions of 5 micrometers and depth resolutions of 10 micrometers . We have developed scanning techniques that allow planes in the sample to be imaged in less than 1 second and we have extended the scanning capabilities to allow for scanning over spherical convex or concave surfaces.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark Bashkansky, Mark Bashkansky, Michael D. Duncan, Michael D. Duncan, John F. Reintjes, John F. Reintjes, } "Optical gating techniques for material inspection", Proc. SPIE 3201, Sensors and Controls for Advanced Manufacturing, (2 January 1998); doi: 10.1117/12.298019; https://doi.org/10.1117/12.298019
PROCEEDINGS
9 PAGES


SHARE
Back to Top