1 January 1998 Microwork transfer system in a nanomanufacturing world
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Proceedings Volume 3202, Microrobotics and Microsystem Fabrication; (1998) https://doi.org/10.1117/12.298032
Event: Intelligent Systems and Advanced Manufacturing, 1997, Pittsburgh, PA, United States
Abstract
Practical micromachines, such as magnetic heads or endoscopic tools, can not be made only by shaping processes; they require post-machining processes such as assembling, wiring, piping, etc. The authors have developed an integrated manufacturing system, 'nano manufacturing world' (NMW). It performs shaping, post-machining or transferring like a factory. In this paper, we introduce a microwork transfer system, which functions a) steady transfer of a workpiece, b) non-release chucking of the workpiece during production and c) individual rotation of the workpiece using a preloaded microslide bearing on the pallet. Developed transfer system could realize the functions: less positioning error due to accurate pallet positioning by taper pins, high transfer yield of the workpieces due to no missing by a micro chuck, sub-micron rotational fluctuation due to a roller pallet by a preloaded micro slide bearing. Through the fabrication demonstrations of a sub-1 mm3 micro-house or micro force sensor block of 125 X 100 X 500 micrometers , it has been confirmed that this transfer system improved the performance of integrated manufacturing in NMW.
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Kensuke Tsuchiya, Kensuke Tsuchiya, Masayuki Nakao, Masayuki Nakao, Takenori Okusa, Takenori Okusa, Yotaro Hatamura, Yotaro Hatamura, Kiyoshi Matsumoto, Kiyoshi Matsumoto, } "Microwork transfer system in a nanomanufacturing world", Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); doi: 10.1117/12.298032; https://doi.org/10.1117/12.298032
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