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1 January 1998 Sensor-guided nanorobots
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Proceedings Volume 3202, Microrobotics and Microsystem Fabrication; (1998) https://doi.org/10.1117/12.298040
Event: Intelligent Systems and Advanced Manufacturing, 1997, Pittsburgh, PA, United States
Abstract
Autonomous nanorobots with overall dimensions in the micrometer domain promise fascinating applications in fields ranging from nanofabrication on the molecular scale to minimal invasive surgery in hard-to-reach places - yet, they are beyond the reach of current technology. IN contrast, scanning probe microscopes, despite their macroscopic overall dimensions, have amply proved their versatility in accessing the nanometer scale and providing the user an interface to interact with structures down to single atoms directly. To explore and evaluate control strategies for future nanorobots, we extended the capabilities of an atomic force microscope beyond its intrinsic nanometer-resolution surface-imaging function. To this end, we implemented an additional control loop which automatically guides a multifunctional nanoprobe to user-specified features on integrated circuits, tracks their structure, and acquires multichannel information about their local geometric and electric properties.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Stemmer and Markus Brunner "Sensor-guided nanorobots", Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); https://doi.org/10.1117/12.298040
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