Heterodyne Receiver On Silicon: An Exercise In Integration

S. Sriram; G. B. Brandt; E. P. Supertzi

doi:10.1117/12.933211

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27 August 1982 Heterodyne Receiver On Silicon: An Exercise In Integration

S. Sriram, G. B. Brandt, E. P. Supertzi

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Proceedings Volume 0321, Integrated Optics II; (1982) https://doi.org/10.1117/12.933211
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

We have designed and fabricated an integrated optical device which utilizes bulk acousto-optic modulation to introduce GHz modulation on the guided light. This device, which may be used as either a heterodyne receiver or modulator in a high frequency optical data link, is fabricated on a silicon substrate using photolithographic and etching techniques developed for semiconductor manufacture. Modulation is accomplished utilizing segmented thin film acoustic transducers. Fabrication of this device involves nearly twenty separate operations each of which must be successful in order for the device to work. We discuss these fabrication steps and their influence on the overall yield of this integrated optical device.

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S. Sriram, G. B. Brandt, and E. P. Supertzi "Heterodyne Receiver On Silicon: An Exercise In Integration", Proc. SPIE 0321, Integrated Optics II, (27 August 1982); https://doi.org/10.1117/12.933211

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