27 August 1997 Silicon bipolar transistor scaling for advanced BiCMOS SRAM applications
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Abstract
In this paper, we discuss scaled silicon bipolar transistor performance for advanced BiCMOS SRAM applications. In particular, we present experimental results of non-self aligned, single poly emitter bipolar transistors with critical dimensions scaled vertically and laterally. We demonstrate the device performance enhancement by properly scaling and show device design tradeoffs with key bipolar device parameters.
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H. Tian, Asanga H. Perera, D. O'Meara, H. De, C. K. Subramanian, P. Rehmann, James D. Hayden, Norm Herr, "Silicon bipolar transistor scaling for advanced BiCMOS SRAM applications", Proc. SPIE 3212, Microelectronic Device Technology, (27 August 1997); doi: 10.1117/12.284616; https://doi.org/10.1117/12.284616
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