Characterization of high-density plasma CVD USG film

Wei Lu; Jia Zhen Zheng; John Sudijuno; Hoon Lian Yap; Kok Seng Fam; Catherine Leong; Marvin D. Liao; Yih Shung Lin

doi:10.1117/12.284655

5 September 1997 Characterization of high-density plasma CVD USG film

Wei Lu, Jia Zhen Zheng, John Sudijuno, Hoon Lian Yap, Kok Seng Fam, Catherine Leong, Marvin D. Liao, Yih Shung Lin

Proceedings Volume 3214, Multilevel Interconnect Technology; (1997) https://doi.org/10.1117/12.284655
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

The HDP-CVD oxide deposition process has been fully investigated with the change of gas flow and RF power up to +/- 20%. The film quality is very stable with a wet etch rate ratio (WERR) of 1.5 relative to thermal oxide. The uniformity for both sputter and deposition are all below 3%, and the D/S ratio is only sensitively affected by bias RF power and side SiH₄ flow. Three important factors, namely bias-RF, backside He flow and O₂/SiH₄ ratio, which affect strongly on the film quality, are studied in detail by measurement of film refractive index, stress, water absorption, WERR, and by pressure cook test (PCT). Lower backside He pressure as well as higher bias-RF power result in higher wafer temperature and better film quality. After PCT, the films do not show any increase in the silanol content and WERR. A liner process with lower bias-RF power is discussed to protect corner sputtering and plasma charging.

Citation Download Citation

Wei Lu, Jia Zhen Zheng, John Sudijuno, Hoon Lian Yap, Kok Seng Fam, Catherine Leong, Marvin D. Liao, and Yih Shung Lin "Characterization of high-density plasma CVD USG film", Proc. SPIE 3214, Multilevel Interconnect Technology, (5 September 1997); https://doi.org/10.1117/12.284655

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available