11 September 1997 Automatic final inspection: an important nonexpensive control to guarantee long-term reliability
Author Affiliations +
Abstract
After final electrical tests of microchips, an additional visual inspection is performed to guarantee their long term reliability. This step is time consuming and highly labour intensive. To reduce costs, and to improve at the same time the defect density monitoring using a higher sampling rate, the final visual inspection performed manually by operators, is replaced by an automatic inspection. This paper illustrates how the high sampling rate of a automatic final inspection may be used for better defect monitoring through final insulator layers, monitoring underlying metal layers as well.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Friedbald Kiel, Friedbald Kiel, Guiseppe Balbo, Guiseppe Balbo, Eyal Duzi, Eyal Duzi, Olga Andrianaivo-Golz, Olga Andrianaivo-Golz, Thomas Kohnen, Thomas Kohnen, } "Automatic final inspection: an important nonexpensive control to guarantee long-term reliability", Proc. SPIE 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III, (11 September 1997); doi: 10.1117/12.284687; https://doi.org/10.1117/12.284687
PROCEEDINGS
7 PAGES


SHARE
Back to Top