11 September 1997 Knowledge-based software system for fast yield loss detection in a semiconductor fab
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The comparative analysis of process machines in terms of yield related metrics (such as probe and E-Test data, process and particle data,. ..) is a source of a great deal of information for yield improvement. With this aim we published on SPIE's Microelectronic Manufacturing an Advanced Software System to detect machine-related yield limitors using a comparative analysis. This paper presents the natural expansion of that Software System by converting it into a more knowledge-based tool for fast yield loss detection on a semiconductor fab. The new System performs, in an automatic mode, the comparison among machines for every single step selected in the fabrication routing. The detection of statistically significative differences among machines at every step is performed using algorithms that incorporate the overall analysts experience on our fab. The output of the System allows a fast detection and reaction to yield issues, mainly to those that are still on the initial or baseline stages.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victorino Martin Santamaria, Miguel Recio, Miguel Alonso Merino, Julian Moreno, Almudena Fernandez, Gerardo Gonzalez, Guillermo Sanchez, Luis J. Barrios, Maria D. del Castillo, Lissette Lemus, Angel L. Gonzalez, "Knowledge-based software system for fast yield loss detection in a semiconductor fab", Proc. SPIE 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III, (11 September 1997); doi: 10.1117/12.284691; https://doi.org/10.1117/12.284691


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