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Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection
Wet chemical isotropic etching procedures of silicon: a possibility for the production of deep-structured microcomponents
Comprehensive study of processing parameters influencing the stress and stress gradient of thick polysilicon layers
Single-sided multilevel structure for silicon pressure transducers by masked-maskless etching technology
Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers