Automotive applications for micromachining

Douglas R. Sparks; Shih-Chia Chang

doi:10.1117/12.284483

5 September 1997 Automotive applications for micromachining

Douglas R. Sparks, Shih-Chia Chang

Proceedings Volume 3223, Micromachining and Microfabrication Process Technology III; (1997) https://doi.org/10.1117/12.284483
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

High volume silicon micromachining has been employed by the automotive industry for 20 years. This paper examines past, current and future applications of MEMS to the automobile. Both sensor and the application of micromachining to other automotive areas are covered. Technologies such as wet and plasma etching, wafer bonding, LIGA, circuit integration and packaging are discussed.

Citation Download Citation

Douglas R. Sparks and Shih-Chia Chang "Automotive applications for micromachining", Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); https://doi.org/10.1117/12.284483

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