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5 September 1997 Design of a Σ-Δ converter-based automotive sensor
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Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284503
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
The design of a second order (Sigma) - (Delta) converter based microaccelerometer is presented in this paper. This converter has a large dynamic range, i.e., can measure acceleration from 0.5 g to 500 g, and provides directly digital output. The force-rebalance circuitry constraints the sensor mass to move within 10 percent of the distance between the polysilicon layers. The system is inherently linear and has a simple electronic interface.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Barun K. Kar and Eric Joseph "Design of a Σ-Δ converter-based automotive sensor", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284503
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