5 September 1997 Excimer laser micromachining system for the production of bioparticle electromanipulation devices
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Proceedings Volume 3224, Micromachined Devices and Components III; (1997); doi: 10.1117/12.284525
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
Multi-level micro-electrode structures have been produced using excimer laser ablation techniques to obtain devices for the electro-manipulation of bioparticles using traveling electric field dielectrophoresis effects. The system sued to make these devices operates with a krypton fluoride excimer laser at a wavelength of 248 nm and with a repetition rate of 100Hz. The laser illuminates a chrome-on-quartz laser at a wavelength of 248nm and with a repetition rate of 100Hz. The laser illuminates a chrome-on-quartz mask which contains the patterns for the particular electrode structure being made. The masks then imaged by a high-resolution lens onto the sample. Large areas of the mask pattern are transferred to the sample by using synchronized scanning of the mask and workpiece with sub-micron precision. Electrode structures with typical sizes of approximately 10 micrometers are produced and a multi-level device is built up by ablation of electrode patterns and layering insulators. To produce a traveling electric field suitable for the manipulation of bioparticles, a linear array of 10 micrometers by 200 micrometers micro- electrodes, placed at 20 micrometers intervals, is used. The electric field is created by energizing each electrode with a sinusoidal voltage 90 degrees out of phase with that applied to the adjacent electrode. On exposure to the traveling electric field, bioparticles become electrically polarized and experience a linear force and so move along the length of the linear electrode array. The speed and direction of the particles is controlled by the magnitude and frequency of the energizing signals. Such electromanipulation devices have potential uses in a wide range of biotechnological diagnostic and processing applications.
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Nadeem Hasan Rizvi, Erol C. Harvey, Phil T. Rumsby, Julian P.H. Burt, Mark S. Talary, John A. Tame, Ron Pethig, "Excimer laser micromachining system for the production of bioparticle electromanipulation devices", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284525; https://doi.org/10.1117/12.284525
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KEYWORDS
Electrodes

Excimer lasers

Laser systems engineering

Micromachining

Diagnostics

Dielectrics

Dielectrophoresis

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