First reliability test of a surface-micromachined microengine using SHiMMeR

Danelle M. Tanner; Norman F. Smith; Duane J. Bowman; William P. Eaton; Kenneth A. Peterson

doi:10.1117/12.284512

5 September 1997 First reliability test of a surface-micromachined microengine using SHiMMeR

Danelle M. Tanner, Norman F. Smith, Duane J. Bowman, William P. Eaton, Kenneth A. Peterson

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284512
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate, and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines, we designed and built an automated system that has the capability to simultaneously test 256 packaged micromachines. The Sandia high volume measurement of micromachine reliability system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

Citation Download Citation

Danelle M. Tanner, Norman F. Smith, Duane J. Bowman, William P. Eaton, and Kenneth A. Peterson "First reliability test of a surface-micromachined microengine using SHiMMeR", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284512

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