5 September 1997 Integrated thermal sensor using optical channel waveguide
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Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284529
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
Refractive index of polymethyl methacrylate (PMMA) and polystyrene decreases with increase of temperature and due to variation of refractive index the propagation constant of PMMA and polystyrene thin films change. Using this property of those polymer thin films a simple thermal sensor is demonstrated where a channel waveguide to polymer thin-film coupler is used. A thin film of PMMA is deposited on the channel waveguide to polymer thin-film coupler is used. A thin film of PMMA is deposited on the channel waveguide by spin coating method. Optical power from an LED of wavelength (lambda) equals 1.3 micrometers is coupled to the channel waveguide and the throughput power of the channel waveguide is detected by a p-i-n diode at different temperatures. Variation of the throughput channel power is correlated with the change in temperature for potential use in thermal sensing and switching applications. A thin film of polystyrene is also deposited on another channel waveguide and same experiment is performed. It shows the increase in range of temperature for measurement.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Amar K. Ganguly, "Integrated thermal sensor using optical channel waveguide", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.284529; https://doi.org/10.1117/12.284529
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