5 September 1997 Vibration signature analysis sensors for predictive diagnostics
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Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.301968
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
This paper describes frequency vibration sensors for signature analysis on (electro)mechanical components. The application is predictive diagnostics and condition based maintenance on Xerographic printer and copier products. The vibration signature analysis (VSA) sensing devices consist of micromachined arrays of closely spaced silicon mechanical resonators covering a frequency range of 120 Hz to 100 kHz. Resonance of a particular element is detected with a Wheatstone bridge of implanted piezoresistors and the bridge outputs are multiplexed onto a common output line using on- chip p-MOS transistor switches. The design and fabrication of the VSA devices is presented.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric Peeters, Jingkuang Chen, Joel A. Kubby, Olivera Vitomirov, "Vibration signature analysis sensors for predictive diagnostics", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); doi: 10.1117/12.301968; https://doi.org/10.1117/12.301968
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