Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing

Supipta S. Das; Harish M. Manohara; Chantal G. Khan Malek

doi:10.1117/12.284544

2 September 1997 Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing

Supipta S. Das, Harish M. Manohara, Chantal G. Khan Malek

Author Affiliations +

Proceedings Volume 3225, Microlithography and Metrology in Micromachining III; (1997) https://doi.org/10.1117/12.284544
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

In thick photoresist applications, commercially available acrylic sheets are bonded to a substrate as an alternative to the casting and in-situ polymerization of PMMA. The factors affecting the adhesion of a thick acrylic sheet to different substrates have been studied. In case of copper and titanium substrates and bond-strength can be improved by roughening the surface through chemical oxidation which then provides a mechanical interlocking between the resist and substrate surfaces. Annealing of PMMA sheet before gluing and use of adhesion promoter such as organosilane further improves the bond strength at the resist-substrate interface. The resist adhesion to various substrates is evaluated by measuring the debonded length of the acrylic sheet during a mechanical cleaving test.

Citation Download Citation

Supipta S. Das, Harish M. Manohara, and Chantal G. Khan Malek "Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing", Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, (2 September 1997); https://doi.org/10.1117/12.284544

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available