2 September 1997 Physical and chemical sensing using monolithic semiconductor optical transducers
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Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284563
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
We present two monolithically integrated optical sensor systems based on semiconductor photonic integrated circuits. These compact, robust and highly functional transducers perform all necessary optical and electro-optical functions on-chip; extension to multi-sensor arrays is easily envisaged. A monolithic Michelson interferometer for high-resolution displacement measurement and a monolithic Mach-Zehnder interferometer for refractometry are discussed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hans P. Zappe, Hans P. Zappe, Daniel Hofstetter, Daniel Hofstetter, Bernd Maisenhoelder, Bernd Maisenhoelder, Michael Moser, Michael Moser, Peter Riel, Peter Riel, Rino E. Kunz, Rino E. Kunz, } "Physical and chemical sensing using monolithic semiconductor optical transducers", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284563; https://doi.org/10.1117/12.284563
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