2 September 1997 SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)
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Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284568
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
The SAMPLE (Sandia agile MEMS prototyping, layout tools, and education) service makes Sandia's state-of-the-art surface micromachining fabrication process, known as SUMMiT, available to U.S. industry for the first time. The service provides a short course and customized computer-aided design (CAD) tools to assist customers in designing micromachine prototypes to be fabricated in SUMMiT. Frequent small-scale manufacturing runs then provide SAMPLE designers with hundreds of sophisticated MEMS (microelectromechanical systems) chips. SUMMiT (Sandia ultra-planar, multi-level MEMS technology) offers unique surface-micromachining capabilities, including four levels of polycrystalline silicon (including the ground layer), flanged hubs, substrate contacts, one-micron design rules, and chemical-mechanical polishing (CMP) planarization. This paper describes the SUMMiT process, design tools, and other information relevant to the SAMPLE service and SUMMiT process.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brady R. Davies, Brady R. Davies, Carole Craig Barron, Carole Craig Barron, Jeffry J. Sniegowski, Jeffry J. Sniegowski, M. Steven Rodgers, M. Steven Rodgers, } "SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); doi: 10.1117/12.284568; https://doi.org/10.1117/12.284568
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