Mask repair cost's impact on mask cost is studied. The study focuses on 0.35 (mu) through 0.18 (mu) technology generations. General economic observations on mask repair are made. The study was conducted using a commercial cost of ownership model with sensitivity analysis conducted on salient parameters.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wayne Smith, "Is mask repair economic?", Proc. SPIE 3236, 17th Annual BACUS Symposium on Photomask Technology and Management, (12 February 1997); doi: 10.1117/12.301226; https://doi.org/10.1117/12.301226


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