Design and fabrication of doped TiO2-coated surface acoustic wave oxygen sensor

Massood Zandi Atashbar; Wojtek Wlodarski

doi:10.1117/12.293523

14 November 1997 Design and fabrication of doped TiO₂-coated surface acoustic wave oxygen sensor

Massood Zandi Atashbar, Wojtek Wlodarski

Proceedings Volume 3241, Smart Materials, Structures, and Integrated Systems; (1997) https://doi.org/10.1117/12.293523
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

This paper reports on the design and fabrication of surface acoustic wave (SAW) devices using lithium niobate (LiNbO₃) as a substrate. Sol-gel prepared doped TiO₂ thin films have been deposited onto the SAW devices by spin-coating. Modeling and simulation has been performed to predict the performance of SAW oxygen sensor using a high frequency electronics computer software package (HP-EEsof^TM). Experimental work has been carried out for the purpose of evaluation of the simulated results. Resistivity of doped TiO₂ thin films has been found to decrease by 47 fold when oxygen concentration decreases from 1% to 1 ppm at a working temperature of 200 degrees Celsius. The frequency shift of the SAW oxygen sensor has been measured as 180 kHz for the same change in oxygen concentration. Our preliminary experiments highlighted that the doped TiO₂-coated SAW sensors can detect oxygen in the concentration range of 1 ppm-1%.

Citation Download Citation

Massood Zandi Atashbar and Wojtek Wlodarski "Design and fabrication of doped TiO₂-coated surface acoustic wave oxygen sensor", Proc. SPIE 3241, Smart Materials, Structures, and Integrated Systems, (14 November 1997); https://doi.org/10.1117/12.293523

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