14 November 1997 Frequency-tunable electrostatically driven torsional resonator
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Abstract
A torsional mode frequency tunable electrostatically driven resonator is presented. The resonator is designed using the simple linear elastic theory and fabricated by a bulk- micromachining technique. A bias voltage generates an electrostatic vertical force, then induces a bending moment in the torsional spring. The bending moment increases the torsional rigidity equivalently. Thus its natural frequency of oscillation is controlled by changing the bias voltage. A preliminary measurement of the resonator shows a natural frequency shift from 135.85 Hz to 136.10 Hz by the application of a bias voltage of 100 V. The theory, construction, fabrication process and demonstration of the resonator are presented.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takashi Usuda, "Frequency-tunable electrostatically driven torsional resonator", Proc. SPIE 3241, Smart Materials, Structures, and Integrated Systems, (14 November 1997); doi: 10.1117/12.293520; https://doi.org/10.1117/12.293520
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KEYWORDS
Resonators

Electrodes

Doppler effect

Fabrication

Silicon

Glasses

Metrology

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