Smart Sensors I
Smart Sensors II
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Stand-alone remotely interrogated device for the real-time health monitoring of bonded structural repairs
Microelectrode array: a new method for the design of electrostatic microactuators and capacitive microsensors
Design and fabrication of high-torque electrostatic micromotors using micromachining of thin polysilicon sheets
Discussion of integrated circuit (IC), multichip module (MCM), and MEMS applications fabricated through MOSIS
Improved operation of micromechanical comb-drive actuators through the use of a new angled comb-finger design