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14 November 1997 Development of uncooled focal plane detector arrays for smart IR sensors
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Abstract
This paper reports on the development of silicon microbolometer uncooled IR focal plane detector arrays at the Defence Science and Technology Organization (DSTO), in collaboration with the National Defence Research Establishment (FOA). The detector arrays were designed by Electro-optic Sensor Design, which also provided specialist scientific advice on array fabrication. Detector arrays are prepared by monolithic processing at DSTO, using surface micromachining to achieve thermal isolation, and are integrated on-chip with a CMOS signal conditioning and readout microcircuit designed by FOA. The CMOS circuit incorporates 16-bit analog-to-digital conversion, and is described in more detail in an accompanying paper presented. The ultimate objective is to develop 'smart' focal plane arrays which have on-chip signal processing functions, giving a capability for decision making such as automatic target detection. The silicon microbolometer technology described in the paper was invented at DSTO, and is representative of core technology employed in many initiatives world-wide. A brief overview will be given of theoretical considerations which influence detector array design, followed by an outline of recent developments in array processing.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kevin Charles Liddiard, Olaf Reinhold, Ulf Ringh, and Christer Jansson "Development of uncooled focal plane detector arrays for smart IR sensors", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293568
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