14 November 1997 Force-balanced dual-axis microgyroscope
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Abstract
The surface micromachining process realized the dual-axis microgyroscope. The 7.5 micrometers -thick polysilicon layer deposited by LPCVD is used for the vibrating structure. In this research, we present a new structure with high angular inertia momentum and compact size. In particular, this structure can utilize a simple force-balancing torsional torque which does not need another top electrode layer to reduce the intrinsic non-linearity of a capacitive-type sensor. The gyroscope is tested in a high vacuum chamber for a high Q-factor. The sensing mode is separated 2 percent from the driving mode by applying the inter-plate DC tuning bias. The experiment resulted in a nose equivalent signal of 0.1 deg/sec.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Seungdo An, Seungdo An, Yong-Soo Oh, Yong-Soo Oh, Byeungleul Lee, Byeungleul Lee, Kyu-Yeon Park, Kyu-Yeon Park, Youn-il Go, Youn-il Go, Jeong-gon Kim, Jeong-gon Kim, Ci Moo Song, Ci Moo Song, Seungseob Lee, Seungseob Lee, } "Force-balanced dual-axis microgyroscope", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293554; https://doi.org/10.1117/12.293554
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