Improved operation of micromechanical comb-drive actuators through the use of a new angled comb-finger design

Michel A. Rosa; Sima Dimitrijev; H. Barry Harrison

doi:10.1117/12.293578

14 November 1997 Improved operation of micromechanical comb-drive actuators through the use of a new angled comb-finger design

Michel A. Rosa, Sima Dimitrijev, H. Barry Harrison

Author Affiliations +

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293578
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

A new design for the comb finger structures used in micromechanical electrostatic comb-drive actuators is presented. The new angled comb finger design is simulated using finite element analysis techniques and the results compared with hose obtained from the simulation of a conventional rectangular shaped comb finger. Results obtained demonstrate the greater actuation force generation capabilities of the new angled comb finger design. Actuation forces of up to 4.5 times those generated by standard comb finger designs have been obtained. Finally, a design approach has been demonstrated, allowing the successful design of a device based on the use of the new angled comb finger. This technique ensures the stability of the device throughout its operable range of displacements for both micron and sub-micron comb finger gap widths.

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Michel A. Rosa, Sima Dimitrijev, and H. Barry Harrison "Improved operation of micromechanical comb-drive actuators through the use of a new angled comb-finger design", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293578

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