14 November 1997 Microfabrication of capillary columns on silicon
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Abstract
This paper describes the design and fabrication techniques of micro capillary columns as the main components in a microengineered gas chromatography system. The system is to be developed using silicon micromachining technology, and is designed as a flexible device consisting of four basic modules: a sample injection system, an open tubular column, a gas detector system, and an electronic circuit. Being designed in a modular structure, the system can be operated in a single and multidimensional configurations. The overall device measures 6 cm X 11 cm, making it very portable for field operation. The micromachined capillary columns are isotopically etched on silicon and sealed by Pyrex glass cover plate, measuring 125 cm long, and having rectangular shaped cross sections.
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Goib Wiranto, Goib Wiranto, Noel D. Samaan, Noel D. Samaan, Dennis E. Mulcahy, Dennis E. Mulcahy, David E. Davey, David E. Davey, } "Microfabrication of capillary columns on silicon", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293567; https://doi.org/10.1117/12.293567
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