Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves

Eric Bonnotte; Christophe Gorecki; Hiroshi Toshiyoshi; Hideki Kawakatsu

doi:10.1117/12.293553

14 November 1997 Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves

Eric Bonnotte, Christophe Gorecki, Hiroshi Toshiyoshi, Hideki Kawakatsu

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293553
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

As a novel application of Silicon-based integrated optics, first result of a compact Mach-Zehnder interferometer are presented. This passive device is transformed into an active one by the deposition of a ZnO thin film transducer on the reference arm where the acousto-optics mechanism generates a sinusoidal phase modulation.

Citation Download Citation

Eric Bonnotte, Christophe Gorecki, Hiroshi Toshiyoshi, and Hideki Kawakatsu "Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293553

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