14 November 1997 Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves
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Abstract
As a novel application of Silicon-based integrated optics, first result of a compact Mach-Zehnder interferometer are presented. This passive device is transformed into an active one by the deposition of a ZnO thin film transducer on the reference arm where the acousto-optics mechanism generates a sinusoidal phase modulation.
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Eric Bonnotte, Eric Bonnotte, Christophe Gorecki, Christophe Gorecki, Hiroshi Toshiyoshi, Hiroshi Toshiyoshi, Hideki Kawakatsu, Hideki Kawakatsu, } "Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); doi: 10.1117/12.293553; https://doi.org/10.1117/12.293553
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