Fabrication of hollow fibers for CO2 laser by using MOCVD method

Yuji Matsuura; Daisuke Miura; Mitsunobu Miyagi

doi:10.1117/12.309464

5 June 1998 Fabrication of hollow fibers for CO₂ laser by using MOCVD method

Yuji Matsuura, Daisuke Miura, Mitsunobu Miyagi

Proceedings Volume 3262, Surgical-Assist Systems; (1998) https://doi.org/10.1117/12.309464
Event: BiOS '98 International Biomedical Optics Symposium, 1998, San Jose, CA, United States

Abstract

Hollow fibers for transmitting high-power CO₂ laser light are fabricated by metal organic chemical vapor deposition method. A dielectric film of metal oxides, such as Y₂O₃, ZrO₂ and Cu₂O deposited inside a Ag-coated glass capillary by using metal acetylacetonate as a precursor. The waveguide coated by Cu₂O with the bore diameter of 700 μm showed the lowest attenuation of 0.8 dB/m for CO₂ laser light. The metal oxide films deposited by MOCVD have high chemical and heat resistivity. Therefore the hollow fiber coated with these materials is suitable for high power laser applications under a severe environment.

Citation Download Citation

Yuji Matsuura, Daisuke Miura, and Mitsunobu Miyagi "Fabrication of hollow fibers for CO₂ laser by using MOCVD method", Proc. SPIE 3262, Surgical-Assist Systems, (5 June 1998); https://doi.org/10.1117/12.309464

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