3 June 1998 Energy coupling to materials ablated by intensive pulsed 1-μm radiation: plasma shielding and surface-modification effects
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Abstract
Optical transmission and reflectivity of ceramics and CVD diamond plates prior, in the process and after ablation by intensive nano- and picosecond pulses of Nd:YAG and Nd:YAP lasers are investigated. Laser induced surface layer modification effects and plasma influence are considered. Correlation between crater depth and plasma optical properties was found. The mechanisms of crater walls influence on plasma are discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vitali I. Konov, Vitali I. Konov, Serge V. Garnov, Serge V. Garnov, Sergei M. Klimentov, Sergei M. Klimentov, Taras V. Kononenko, Taras V. Kononenko, O. G. Tsarkova, O. G. Tsarkova, Friedrich Dausinger, Friedrich Dausinger, } "Energy coupling to materials ablated by intensive pulsed 1-μm radiation: plasma shielding and surface-modification effects", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309505; https://doi.org/10.1117/12.309505
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