3 June 1998 Femtosecond lasers and their implications for materials processing
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As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of- the-art in femtosecond laser technology of interest to micro machining.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul B. Corkum, Paul B. Corkum, } "Femtosecond lasers and their implications for materials processing", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309498; https://doi.org/10.1117/12.309498

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