3 June 1998 Femtosecond lasers and their implications for materials processing
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Abstract
As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of- the-art in femtosecond laser technology of interest to micro machining.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul B. Corkum, Paul B. Corkum, "Femtosecond lasers and their implications for materials processing", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309498; https://doi.org/10.1117/12.309498
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