3 June 1998 Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
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Abstract
Multilevel microelectrode structures have been produced using excimer laser ablation techniques to obtain devices for the electro-manipulation of bioparticles using traveling electric field dielectrophoresis effects. The system used to make these devices operates with a krypton fluoride excimer laser at a wavelength of 248 nm and with a repetition rate of 100 Hz. The laser illuminates a chrome-on-quartz mask which contains the patterns for the particular electrode structure being made. The mask is imaged by a high- resolution lens onto the sample. Large areas of the mask pattern are transferred to the sample by using synchronized scanning of the mask and workpiece with sub-micron precision. Electrode structures with typical sizes of approximately 10 micrometers are produced and a multi-level device is built up by ablation of electrode patterns and layered insulators. To produce a traveling electric field suitable for the manipulation of bioparticles, a linear array of 10 micrometers by 200 micrometers microelectrodes, placed at 20 micrometers intervals, is used. The electric field is created by energizing each electrode with a sinusoidal voltage 90 degree(s) out of phase with that applied to the adjacent electrode. On exposure to the traveling electric field, bioparticles become electrically polarized and experience a linear force and so move along the length of the linear electrode array. The speed and direction of the particles is controlled by the magnitude and frequency of the energizing signals. Such electromanipulation devices have potential uses in a wide range of biotechnological diagnostic and processing applications. Details of the overall laser projection system are presented together with data on the devices which have been manufactured so far.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malcolm C. Gower, Erol C. Harvey, Nadeem Hasan Rizvi, Phil T. Rumsby, Julian P.H. Burt, Mark S. Talary, John A. Tame, Ron Pethig, "Manufacture of miniature bioparticle electromanipulators by excimer laser ablation", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309510; https://doi.org/10.1117/12.309510
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KEYWORDS
Electrodes

Particles

Excimer lasers

Dielectrics

Optical lithography

Metals

Laser ablation

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