3 June 1998 Matrix-assisted pulsed-laser evaporation (MAPLE) of functionalized polymers: applications with chemical sensors
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Abstract
A novel polymer processing technique, matrix assisted pulsed laser evaporation (MAPLE), for the deposition of organic and inorganic polymers and other materials, as ultrathin and uniform coatings has been developed. The technique involves directing a pulsed excimer laser beam onto a frozen matrix target composed of the polymeric material in a solvent. The process gently lifts polymeric material into the gas phase with no apparent decomposition. A plume of material is developed normal to the target, and a substrate positioned incident to this plume is coated with the polymer. The MAPLE technique offers a number of features that are difficult to achieve with other polymer coating techniques, including: nano-meter to micron thickness range, sub monolayer thickness precision, high uniformity, applicability to photosensitive materials, and patterning of surfaces. Highly functionalized polysiloxanes have been synthesized and deposited on a range of substrates by the MAPLE technique and characterized by: infrared spectroscopy, and optical microscopy. High quality, uniform and adherent polysiloxane coatings are produced by the optimized MAPLE technique. The physicochemical properties of the coating are unaffected by the process, and precise thickness control of the coating is straightforward.
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Robert Andrew McGill, Robert Andrew McGill, Douglas B. Chrisey, Douglas B. Chrisey, Alberto Pique, Alberto Pique, Todd E. Mlsna, Todd E. Mlsna, } "Matrix-assisted pulsed-laser evaporation (MAPLE) of functionalized polymers: applications with chemical sensors", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309520; https://doi.org/10.1117/12.309520
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