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3 June 1998 New developments of pulsed-laser deposition process
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Abstract
This paper describes the studies on nanoparticle synthesis process by the laser ablation in a background gas and the metal film deposition by the laser-induced forward transfer (LIFT) technique. In order to understand and control the processes, an imaging diagnostic system has been developed. Firstly, the behavior of nanoparticles in a laser ablation plume was studied with the imaging system. The attempt to control the nanoparticle behavior was examined. Next, the metal film deposition by the LIFT technique was studied with the different laser-pulse duration from 160 fs to 60 ms. The results are reported along with the imaging observation of the LIFT process.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tatsuo Okada, Yoshiki Nakata, Junichi Muramoto, and Mitsuo Maeda "New developments of pulsed-laser deposition process", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309518; https://doi.org/10.1117/12.309518
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