3 June 1998 Organic molecular beam deposition combined with laser-induced chemical reactions
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In order to fabricate functional organic thin films, we investigated organic molecular beam deposition combined with laser-induced chemical reactions. Bis(ethynylstyryl) benzene (BESB) films of trans,trans-isomer were deposited by this new method. The cis,cis-BESB was sublimed and cis-to-trans photoisomerization was induced upon KrF excimer laser irradiation ((lambda) equals 248 nm). The growth of the well- oriented crystalline films was achieved upon the laser irradiation during the deposition at the substrate temperature of 60 degree(s)C. At this substrate temperature only trans,trans-BESB was deposited on the substrate surface, which indicated that unreacted cis,cis-isomer was re- evaporated from the substrates. It can be explained that the crystal growth favorably proceeded due to the enhancement of the surface migration of the trans,trans-isomer and no hindrance of the cis,cis-isomer. We also fabricated thin films of a reaction product by inducing an intermolecular reaction of BESB with biphenyl-dithiol upon the laser irradiation during the deposition. It is thus found that the new process made it possible to produce the functional organic thin films, which were difficult to be evaporated by the conventional vacuum process. We discussed the chemical reactions and the deposition behavior in our process.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroyuki Fuchigami, Hiroyuki Fuchigami, Yukiyasu Nakao, Yukiyasu Nakao, Sachiko Tanimura, Sachiko Tanimura, Yasushi Uehara, Yasushi Uehara, Tetsuy Kurata, Tetsuy Kurata, Sei Tsunoda, Sei Tsunoda, Hiroyuki Niino, Hiroyuki Niino, Akira Yabe, Akira Yabe, } "Organic molecular beam deposition combined with laser-induced chemical reactions", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309524; https://doi.org/10.1117/12.309524

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