3 June 1998 Transition from laboratory to manufacturing for a dry laser-assisted cleaning technology
Author Affiliations +
Abstract
A photon flux from a laser can provide an alternative method to clean and prepare industrial surfaces. The laser-based cleaning method presented in this paper uses only photons coupled with a laminar, flowing gas which is inert to the surface. This method can eliminate or reduce the water and chemical volumes used in industrial applications. In this paper, the development issues bringing a technology into the mainstream are discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Audrey C. Engelsberg, Audrey C. Engelsberg, } "Transition from laboratory to manufacturing for a dry laser-assisted cleaning technology", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); doi: 10.1117/12.309499; https://doi.org/10.1117/12.309499
PROCEEDINGS
10 PAGES


SHARE
RELATED CONTENT


Back to Top