1 April 1998 New 3D surface profile measurement based on phase-shift interfering technology
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Abstract
This paper describes a kind of profiler with the above features. It uses the white-light interfering method and adopts the structure of Micelson interferometer. It includes the light bulb used as the light resource, CCD used as the sensor, PZT providing microscopic translating and the computer sampling and processing data with high speed. When the reference-mirror translating, computing and comparing the modulation M of each point of the surface will give their relative surface height. Then we obtain the surface profile of object to be measured.
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Bo Liu, Ling Yang, Jianying Fan, Jian Zhang, "New 3D surface profile measurement based on phase-shift interfering technology", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304407; https://doi.org/10.1117/12.304407
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