1 April 1998 Rapid and accurate determination of transparency, conductivity, etchability, patternability, and manufacturability of ITO films
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Abstract
We present a method for the rapid characterization of indium tin oxide (ITO) films. The method determines, from a simple optical measurement, the values of the refractive index (n) and extinction coefficient (k) from 190 to 1100 nm, film thickness, and energy band gap. Also we show that the spectra of the extinction coefficient can be correlated to the film's resistivity. This capability allows the determination of values for the resistivity of ITO films from a very fast and simple optical measurement.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Bloom, D. Bloom, George G. Li, George G. Li, Kai Zhang, Kai Zhang, A. Rahim Forouhi, A. Rahim Forouhi, Iris Bloomer, Iris Bloomer, } "Rapid and accurate determination of transparency, conductivity, etchability, patternability, and manufacturability of ITO films", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); doi: 10.1117/12.304401; https://doi.org/10.1117/12.304401
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